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Foup（front opening unified pod）とは、半導体製造工程で用いられる 密閉型の容器 であり、ウエハーを安全に保管・輸送するためのシステムです。 Foupとはfront opening unified pod（フロントオープニング統合ポッド）の略称であり、半導体製造工程において欠かせない装置です。 foupはウエハを保護し、クリーン. Foupはfront opening unified podの略で、300mmウェーハを装置内に搬送・搬入する際に使用されるboxです。 前述のfosbよりもウェーハ保持機構が弱く、ウェーハを.
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Foupとはsemi（semiconductor equipment and materials institute）規格に準拠している300ミリウエハー用の搬送容器であり、ミニエンバイロメント方式と同程度のク.
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